Closed-loop wavefront calibration of a multi-electrode electrowetting-based tunable microlens

Abstract: Tunable liquid micro-optical lenses and phase shifters based on multi-electrode electrowetting actuation are often subject to wavefront errors due to processing irregularities or surface defects. To enable the correction of these anomalies, we present here a method that allows calibration and compensation for wavefront errors, thereby leading to the best possible optimization of the tunable optical surface. The approach relies on a measurement of the transmitted wavefront using a Shack–Hartmann sensor and subsequent determination of the actual surface shape. The deviation between this and the target surface shape is calculated, and the electrode voltages are iteratively adjusted. A decentralized control algorithm is implemented which treats the meniscus height at each electrode as a variable with independent feedback; an adaptive update condition determines which electrodes should be adjusted in each cycle. Experimentally obtained calibration curves for a 32-electrode device demonstrate the power and utility of the method

Object Details

• Location: Deutsche Nationalbibliothek Frankfurt am Main
• Extent: Online-Ressource
• Language: Englisch
• Notes: Journal of Optical Microsystems. - 5, 01 (2025) , 014003, ISSN: 2708-5260

Classification and Topics

• Classification: Elektrotechnik, Elektronik

Contributors, Places and Time

• Event: Veröffentlichung
• (where): Freiburg
• (who): Universität
• (when): 2025
• Creator: Sauter, Daniel ; Zappe, Hans P.

Further information

• DOI: 10.1117/1.jom.5.1.014003
• URN: urn:nbn:de:bsz:25-freidok-2624503
• Rights: Open Access; Der Zugriff auf das Objekt ist unbeschränkt möglich.
• Last update: 15.08.2025, 7:28 AM CEST