Rapid, noncontact, sensitive, and semiquantitative characterization of buffered hydrogen-fluoride-treated silicon wafer surfaces by terahertz emission spectroscopy
- Location
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Deutsche Nationalbibliothek Frankfurt am Main
- ISSN
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2047-7538
- Extent
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Online-Ressource
- Language
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Englisch
- Notes
-
online resource.
- Bibliographic citation
-
Rapid, noncontact, sensitive, and semiquantitative characterization of buffered hydrogen-fluoride-treated silicon wafer surfaces by terahertz emission spectroscopy ; volume:11 ; number:1 ; day:25 ; month:11 ; year:2022 ; pages:1-12 ; date:12.2022
Light ; 11, Heft 1 (25.11.2022), 1-12, 12.2022
- Creator
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Yang, Dongxun
Mannan, Abdul
Murakami, Fumikazu
Tonouchi, Masayoshi
- Contributor
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SpringerLink (Online service)
- DOI
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10.1038/s41377-022-01033-x
- URN
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urn:nbn:de:101:1-2023020621151495623364
- Rights
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Open Access; Der Zugriff auf das Objekt ist unbeschränkt möglich.
- Last update
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14.08.2025, 10:46 AM CEST
Data provider
This object is provided by:
Deutsche Nationalbibliothek. If you have any questions about the object, please contact the data provider.
Deutsche Nationalbibliothek. If you have any questions about the object, please contact the data provider.
Associated
- Yang, Dongxun
- Mannan, Abdul
- Murakami, Fumikazu
- Tonouchi, Masayoshi
- SpringerLink (Online service)
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