Laser Interference Lithography for Fabrication of Planar Scale Gratings for Optical Metrology
- Location
-
Deutsche Nationalbibliothek Frankfurt am Main
- ISSN
-
2520-8128
- Extent
-
Online-Ressource
- Language
-
Englisch
- Notes
-
online resource.
- Bibliographic citation
-
Laser Interference Lithography for Fabrication of Planar Scale Gratings for Optical Metrology ; day:16 ; month:1 ; year:2021 ; pages:1-25
Nanomanufacturing and metrology ; (16.1.2021), 1-25
- Creator
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Shimizu, Yuki
- Contributor
-
SpringerLink (Online service)
- DOI
-
10.1007/s41871-020-00083-2
- URN
-
urn:nbn:de:101:1-2021030818514649131600
- Rights
-
Open Access; Der Zugriff auf das Objekt ist unbeschränkt möglich.
- Last update
-
15.08.2025, 7:20 AM CEST
Data provider
This object is provided by:
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Deutsche Nationalbibliothek. If you have any questions about the object, please contact the data provider.
Associated
- Shimizu, Yuki
- SpringerLink (Online service)
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