Correction of Interferometric High-Order Nonlinearity Error in Metrological Atomic Force Microscopy
- Standort
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Deutsche Nationalbibliothek Frankfurt am Main
- ISSN
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2520-8128
- Umfang
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Online-Ressource
- Sprache
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Englisch
- Anmerkungen
-
online resource.
- Erschienen in
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Correction of Interferometric High-Order Nonlinearity Error in Metrological Atomic Force Microscopy ; volume:5 ; number:4 ; day:6 ; month:10 ; year:2022 ; pages:412-422 ; date:12.2022
Nanomanufacturing and metrology ; 5, Heft 4 (6.10.2022), 412-422, 12.2022
- Urheber
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Dai, Gaoliang
Hu, Xiukun
- Beteiligte Personen und Organisationen
-
SpringerLink (Online service)
- DOI
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10.1007/s41871-022-00154-6
- URN
-
urn:nbn:de:101:1-2023030221045826092673
- Rechteinformation
-
Open Access; Der Zugriff auf das Objekt ist unbeschränkt möglich.
- Letzte Aktualisierung
-
14.08.2025, 10:55 MESZ
Datenpartner
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Beteiligte
- Dai, Gaoliang
- Hu, Xiukun
- SpringerLink (Online service)
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