Proof of Concept for Single-phase SOI-based Microchannel Cooling of Large Semiconductor Detectors by Fabricating and Verifying Equivalent Test Structures

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Location
Deutsche Nationalbibliothek Frankfurt am Main
Extent
Online-Ressource
Language
Englisch
Notes
München, Hochschule für Angewandte Wissenschaften München, Masterarbeit, 2022

Event
Veröffentlichung
(where)
München
(who)
Hochschule für Angewandte Wissenschaften München
(when)
2022
Creator
Stadler, Sebastian
Contributor
Treis, Johannes
Kersch, Alfred
Gramich, Matthias
Max-Planck-Gesellschaft Halbleiterlabor (MPG-HLL)

URN
urn:nbn:de:bvb:m347-opus-4062
Rights
Der Zugriff auf das Objekt ist unbeschränkt möglich.
Last update
15.08.2025, 7:28 AM CEST

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Associated

  • Stadler, Sebastian
  • Treis, Johannes
  • Kersch, Alfred
  • Gramich, Matthias
  • Max-Planck-Gesellschaft Halbleiterlabor (MPG-HLL)
  • Hochschule für Angewandte Wissenschaften München

Time of origin

  • 2022

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