Comparative analysis of barium titanate thin films dry etching using inductively coupled plasmas by different fluorine-based mixture gas
- Location
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Deutsche Nationalbibliothek Frankfurt am Main
- ISSN
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1556-276X
- Extent
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Online-Ressource
- Language
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Englisch
- Notes
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online resource.
- Bibliographic citation
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Comparative analysis of barium titanate thin films dry etching using inductively coupled plasmas by different fluorine-based mixture gas ; volume:9 ; number:1 ; day:26 ; month:9 ; year:2014 ; pages:1-8 ; date:12.2014
Nanoscale research letters ; 9, Heft 1 (26.9.2014), 1-8, 12.2014
- Creator
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Li, Yang
Wang, Cong
Yao, Zhao
Kim, Hong-Ki
Kim, Nam-Young
- Contributor
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SpringerLink (Online service)
- DOI
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10.1186/1556-276X-9-530
- URN
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urn:nbn:de:101:1-2021082807411170700129
- Rights
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Open Access; Der Zugriff auf das Objekt ist unbeschränkt möglich.
- Last update
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14.08.2025, 11:00 AM CEST
Data provider
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Deutsche Nationalbibliothek. If you have any questions about the object, please contact the data provider.
Associated
- Li, Yang
- Wang, Cong
- Yao, Zhao
- Kim, Hong-Ki
- Kim, Nam-Young
- SpringerLink (Online service)
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Crystallization behaviour of barium titanate thin films
Electromechanical Properties of Robocasted Barium Titanate Ceramics
Correction: Oxygen diffusion in single crystal barium titanate
Defect properties of vanadium doped barium titanate ceramics
Synthesis and Characterization of Nanocrystalline Barium–Samarium Titanate
Barium Titanate Nanostructures and Thin Films for Photonics
Defect level identification in acceptor-doped polycrystalline barium titanate
High temperature creep‐mediated functionality in polycrystalline barium titanate
A thermodynamic potential for barium zirconate titanate solid solutions
Enhanced Piezocatalytic Water Splitting by Platinum‐Decorated Barium Titanate
Electro‐Optic Metasurfaces Based on Barium Titanate Nanoparticle Films
Oxygen diffusion in single crystal barium titanate
Crystallization behaviour of barium titanate thin films
Electromechanical Properties of Robocasted Barium Titanate Ceramics
Correction: Oxygen diffusion in single crystal barium titanate
Defect properties of vanadium doped barium titanate ceramics
Synthesis and Characterization of Nanocrystalline Barium–Samarium Titanate
Barium Titanate Nanostructures and Thin Films for Photonics
Defect level identification in acceptor-doped polycrystalline barium titanate
High temperature creep‐mediated functionality in polycrystalline barium titanate
A thermodynamic potential for barium zirconate titanate solid solutions
Enhanced Piezocatalytic Water Splitting by Platinum‐Decorated Barium Titanate