Calculation of Phase Diagrams and First-Principles Study of Germanium Impacts on Phosphorus Distribution in Czochralski Silicon

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Location: Deutsche Nationalbibliothek Frankfurt am Main

ISSN: 1543-186X

Extent: Online-Ressource

Language: Englisch

Notes: online resource.

Bibliographic citation: Calculation of Phase Diagrams and First-Principles Study of Germanium Impacts on Phosphorus Distribution in Czochralski Silicon ; day:21 ; month:4 ; year:2021 ; pages:1-17
Journal of electronic materials ; (21.4.2021), 1-17

Creator: Dong, Hongqun
Tao, Xiaoma
Paulasto-Kröckel, Mervi

Contributor: SpringerLink (Online service)

DOI: 10.1007/s11664-021-08861-4

URN: urn:nbn:de:101:1-2021060721582744675179

Rights: Open Access; Der Zugriff auf das Objekt ist unbeschränkt möglich.

Last update: 14.08.2025, 10:47 AM CEST

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Dong, Hongqun
Tao, Xiaoma
Paulasto-Kröckel, Mervi
SpringerLink (Online service)

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Calculation of Phase Diagrams and First-Principles Study of Germanium Impacts on Phosphorus Distribution in Czochralski Silicon

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