Highly integrable silicon micropumps using lateral electrostatic bending actuators
- Standort
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Deutsche Nationalbibliothek Frankfurt am Main
- Umfang
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1 Online-Ressource.
- Sprache
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Englisch
- Erschienen in
-
Highly integrable silicon micropumps using lateral electrostatic bending actuators ; day:9 ; month:4 ; year:2024 ; pages:1-12
Microsystem technologies ; (9.4.2024), 1-12
- Urheber
- Beteiligte Personen und Organisationen
-
SpringerLink (Online service)
- DOI
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10.1007/s00542-024-05635-w
- URN
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urn:nbn:de:101:1-2406241208304.118203903068
- Rechteinformation
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Open Access; Der Zugriff auf das Objekt ist unbeschränkt möglich.
- Letzte Aktualisierung
-
14.08.2025, 10:50 MESZ
Datenpartner
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Beteiligte
- Uhlig, Sebastian
- Gaudet, Matthieu
- Langa, Sergiu
- Ruffert, Christine
- Jongmanns, Marcel
- Schenk, Harald
- SpringerLink (Online service)
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