Nonthermal plasma synthesis of silicon carbonitride

Abstract: The use of a low‐temperature plasma for the synthesis of amorphous silicon carbonitride (SiCN) nanoparticles enables the realization of sintered bulk samples with high thermal stability. Amorphous SiCN nanoparticles are produced from a mixture of silane, methane, and ammonia utilizing a mid‐pressure, radio‐frequency, continuous flow reactor. Particle characterization shows that the nanoparticles are largely amorphous with some crystalline silicon and silicon carbide domains <10 nm in size. Compositional tuning, controlled by varying the precursor flow rates, coupled with the uniform mixing of elements at the nanoscale, results in samples that resist crystallization even when sintered at temperatures as high as 2000°C. This study suggests that the low‐temperature plasma synthesis of nanoparticles has great potential to produce bulk structural materials for application in harsh environments.

Object Details

• Location: Deutsche Nationalbibliothek Frankfurt am Main
• Extent: Online-Ressource
• Language: Englisch

References and Relationships

• Bibliographic citation: Nonthermal plasma synthesis of silicon carbonitride ; day:12 ; month:05 ; year:2023 ; extent:10 ; Plasma processes and polymers ; (12.05.2023) (gesamt 10)

Contributors, Places and Time

• Creator: Herzberg, Steven ; Mathaudhu, Suveen N. ; Mangolini, Lorenzo

Further information

• DOI: 10.1002/ppap.202300021
• URN: urn:nbn:de:101:1-2023051315034886894604
• Rights: Open Access; Der Zugriff auf das Objekt ist unbeschränkt möglich.
• Last update: 14.08.2025, 11:02 AM CEST