- Standort
-
Deutsche Nationalbibliothek Frankfurt am Main
- ISSN
-
2196-7237
- Umfang
-
Online-Ressource
- Sprache
-
Englisch
- Anmerkungen
-
online resource.
- Erschienen in
-
Dry Etching of Germanium with Laser Induced Reactive Micro Plasma ; volume:8 ; number:3 ; day:16 ; month:6 ; year:2021 ; pages:237-255 ; date:9.2021
Lasers in manufacturing and materials processing ; 8, Heft 3 (16.6.2021), 237-255, 9.2021
- Urheber
-
Ehrhardt, Martin
Lorenz, Pierre
Bauer, Jens
Heinke, Robert
Hossain, Mohammad Afaque
Han, Bing
Zimmer, Klaus
- Beteiligte Personen und Organisationen
-
SpringerLink (Online service)
- DOI
-
10.1007/s40516-021-00147-1
- URN
-
urn:nbn:de:101:1-2021110705560036986896
- Rechteinformation
-
Open Access; Der Zugriff auf das Objekt ist unbeschränkt möglich.
- Letzte Aktualisierung
-
15.08.2025, 07:27 MESZ
Datenpartner
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Beteiligte
- Ehrhardt, Martin
- Lorenz, Pierre
- Bauer, Jens
- Heinke, Robert
- Hossain, Mohammad Afaque
- Han, Bing
- Zimmer, Klaus
- SpringerLink (Online service)
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