Stepwise Fabrication and Optimization of Coplanar Waveguide Resonator Hybrid Devices

From the background of microwave‐optomechanical experiments involving carbon nanotubes, the optimization of superconducting coplanar waveguide resonator devices is discussed. Two devices, one with unmodified geometry compared to previous work and one integrating several improvements, are lithographically built up step‐by‐step. After each step, the low‐temperature GHz transmission properties are retested. This allows to identify the impact of the fabrication and the geometry modification on the device properties. In addition, simplified circuit geometries are modeled numerically, confirming the experimental results and providing further insights for optimization.

Location
Deutsche Nationalbibliothek Frankfurt am Main
Extent
Online-Ressource
Language
Englisch

Bibliographic citation
Stepwise Fabrication and Optimization of Coplanar Waveguide Resonator Hybrid Devices ; day:27 ; month:06 ; year:2023 ; extent:5
Physica status solidi / B. B, Basic solid state physics ; (27.06.2023) (gesamt 5)

Creator
Kellner, Nicole
Hüttner, Niklas
Will, Marco
Hakonen, Pertti
Hüttel, Andreas K.

DOI
10.1002/pssb.202300187
URN
urn:nbn:de:101:1-2023062815191155311929
Rights
Open Access; Der Zugriff auf das Objekt ist unbeschränkt möglich.
Last update
14.08.2025, 10:57 AM CEST

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Associated

  • Kellner, Nicole
  • Hüttner, Niklas
  • Will, Marco
  • Hakonen, Pertti
  • Hüttel, Andreas K.

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