Quantification of area-selective deposition on nanometer-scale patterns using Rutherford backscattering spectrometry

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Location: Deutsche Nationalbibliothek Frankfurt am Main

ISSN: 2045-2322

Extent: Online-Ressource

Language: Englisch

Notes: online resource.

Bibliographic citation: Quantification of area-selective deposition on nanometer-scale patterns using Rutherford backscattering spectrometry ; volume:12 ; number:1 ; day:22 ; month:10 ; year:2022 ; pages:1-8 ; date:12.2022
Scientific reports ; 12, Heft 1 (22.10.2022), 1-8, 12.2022

Creator: Claessens, Niels
Khan, Zamran Zahoor
Haghighi, Negin Rahnemai
Delabie, Annelies
Vantomme, André
Vandervorst, Wilfried
Meersschaut, Johan

Contributor: SpringerLink (Online service)

DOI: 10.1038/s41598-022-22645-8

URN: urn:nbn:de:101:1-2023010621120202439888

Rights: Open Access; Der Zugriff auf das Objekt ist unbeschränkt möglich.

Last update: 15.08.2025, 7:32 AM CEST

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Associated

Claessens, Niels
Khan, Zamran Zahoor
Haghighi, Negin Rahnemai
Delabie, Annelies
Vantomme, André
Vandervorst, Wilfried
Meersschaut, Johan
SpringerLink (Online service)

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Chemical analysis of solid-liquid interfaces by Liquid-Rutherford Backscattering Spectrometry

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Paul Rutherford : Portrait des Jazzmusikers Paul Rutherford

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Quantification of area-selective deposition on nanometer-scale patterns using Rutherford backscattering spectrometry

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Associated

Other Objects (12)

Chemical analysis of solid-liquid interfaces by Liquid-Rutherford Backscattering Spectrometry

Analysis of Rutherford backscattering spectra with CNN-GRU mixture density network

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Paul Rutherford : Portrait des Jazzmusikers Paul Rutherford

Rutherford, Ernest

Rutherford, Ernest

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Rutherford, Ernest

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Rutherford, Ernest

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Rutherford, Ernest

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