Fabrication of PDMS nano-mold by deposition casting method

Abstract: Nanoimprinting is a high-throughput, low-cost, and high-precision nanofabrication technology. In this article, we proposed a method for fabricating PDMS nano-molds by side etching deposition casting. During the fabrication process, we used a wet etching method to obtain the etching width, a nanogap was formed when the deposition process was completed, and finally, the nanochannel was obtained by the lift-off method. Then, the casting method was used to replicate the nanochannel pattern to create the polydimethylsiloxane (PDMS) nano-mold. The effect of development time on the morphology of photoresist patterns was studied, the relationship between etching time and etching width was analyzed, and the effect of different deposition methods on the formation of nanochannels was studied. We believe that the proposed method can play a certain role in promoting the development of nanotechnology and nanoscience.

Object Details

• Location: Deutsche Nationalbibliothek Frankfurt am Main
• Extent: Online-Ressource
• Language: Englisch

References and Relationships

• Bibliographic citation: Fabrication of PDMS nano-mold by deposition casting method ; volume:14 ; number:1 ; year:2025 ; extent:10 ; Nanotechnology reviews ; 14, Heft 1 (2025) (gesamt 10)

Contributors, Places and Time

• Creator: Guo, Ran ; Zhang, Changlong ; Xue, Liwei ; Li, Xuan ; Chen, Liguo ; Zheng, Zhou

Further information

• DOI: 10.1515/ntrev-2025-0149
• URN: urn:nbn:de:101:1-2503080526362.133304740068
• Rights: Open Access; Der Zugriff auf das Objekt ist unbeschränkt möglich.
• Last update: 15.08.2025, 7:39 AM CEST