Effective surface oxidation of polymer replica molds for nanoimprint lithography

Location
Deutsche Nationalbibliothek Frankfurt am Main
ISSN
1556-276X
Extent
Online-Ressource
Language
Englisch
Notes
online resource.

Bibliographic citation
Effective surface oxidation of polymer replica molds for nanoimprint lithography ; volume:7 ; number:1 ; day:5 ; month:1 ; year:2012 ; pages:1-4 ; date:12.2012
Nanoscale research letters ; 7, Heft 1 (5.1.2012), 1-4, 12.2012

Creator
Ryu, Ilhwan
Hong, Dajung
Yim, Sanggyu
Contributor
SpringerLink (Online service)

DOI
10.1186/1556-276X-7-39
URN
urn:nbn:de:101:1-2021061720541478336200
Rights
Open Access; Der Zugriff auf das Objekt ist unbeschränkt möglich.
Last update
14.08.2025, 10:55 AM CEST

Data provider

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Associated

  • Ryu, Ilhwan
  • Hong, Dajung
  • Yim, Sanggyu
  • SpringerLink (Online service)

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