Quasi-statically actuated MEMS scanner with concentric vertical comb electrodes
- Standort
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Deutsche Nationalbibliothek Frankfurt am Main
- Umfang
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1 Online-Ressource.
- Sprache
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Englisch
- Erschienen in
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Quasi-statically actuated MEMS scanner with concentric vertical comb electrodes ; volume:12 ; number:1 ; day:31 ; month:1 ; year:2024 ; pages:1-7 ; date:12.2024
Micro and Nano Systems Letters ; 12, Heft 1 (31.1.2024), 1-7, 12.2024
- Urheber
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Chae, Daehwan
Jeong, Do-hyeon
Yun, Seong-jong
Jo, Kyoung-woo
Lee, Jong-Hyun
- Beteiligte Personen und Organisationen
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SpringerLink (Online service)
- DOI
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10.1186/s40486-023-00188-5
- URN
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urn:nbn:de:101:1-2024041316231653809762
- Rechteinformation
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Open Access; Der Zugriff auf das Objekt ist unbeschränkt möglich.
- Letzte Aktualisierung
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14.08.2025, 10:45 MESZ
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Beteiligte
- Chae, Daehwan
- Jeong, Do-hyeon
- Yun, Seong-jong
- Jo, Kyoung-woo
- Lee, Jong-Hyun
- SpringerLink (Online service)
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