Konferenzschrift | Kongress
EMLC 2005 : lectures held at the GMM conference, January 31 - February 03, 2005 in Dresden, Germany
- Location
-
Deutsche Nationalbibliothek Frankfurt am Main
- ISBN
-
9783800728756
3800728753
- Dimensions
-
30 cm
- Extent
-
297 S.
- Language
-
Englisch
- Notes
-
Ill., graph. Darst.
Literaturangaben
- Bibliographic citation
-
GMM-Fachbericht / Gesellschaft Mikroelektronik, Mikro- und Feinwerktechnik ; 45
- Classification
-
Ingenieurwissenschaften und Maschinenbau
- Keyword
-
Maskentechnik
Fotolithografie
- Event
-
Veröffentlichung
- (where)
-
Berlin, Offenbach
- (who)
-
VDE-Verl.
- (when)
-
2005
- Contributor
- Table of contents
- Rights
-
Bei diesem Objekt liegt nur das Inhaltsverzeichnis digital vor. Der Zugriff darauf ist unbeschränkt möglich.
- Last update
-
11.03.2025, 12:31 PM CET
Data provider
This object is provided by:
Deutsche Nationalbibliothek. If you have any questions about the object, please contact the data provider.
Deutsche Nationalbibliothek. If you have any questions about the object, please contact the data provider.
Object type
- Konferenzschrift
- Kongress
Associated
- Behringer, Uwe
- EMLC (21 : 2005 : Dresden)
- VDE-Verl.
Time of origin
- 2005
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