Growth of carbon nanotubes on different support/catalyst systems for advanced interconnects in integrated circuits : Growth of carbon nanotubes on different support/catalystsystems for advanced interconnects in integrated circuits
- Location
-
Deutsche Nationalbibliothek Frankfurt am Main
- Extent
-
Online-Ressource
- Language
-
Englisch
- Notes
-
Chemnitz, Technische Universität Chemnitz, Dissertation, 2011
- Keyword
-
Carbon nanotubes
Integrated circuits
Nickel
CVD-Verfahren
Kohlenstoff-Nanoröhre
Grenzfläche
Nanopartikel
Integrierte Schaltung
ULSI
Elektronisches Bauelement
Mikroelektronik
Integration
Tantal
Nickel
Chrom
Dünne Schicht
- Event
-
Veröffentlichung
- (where)
-
Chemnitz
- (who)
-
Universitätsbibliothek Chemnitz
- (when)
-
2011
- Creator
- Contributor
-
Schulz, Stefan E.
Geßner, Thomas
Albrecht, Manfred
- URN
-
urn:nbn:de:bsz:ch1-qucosa-78189
- Rights
-
Der Zugriff auf das Objekt ist unbeschränkt möglich.
- Last update
-
14.08.2025, 10:47 AM CEST
Data provider
This object is provided by:
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Deutsche Nationalbibliothek. If you have any questions about the object, please contact the data provider.
Associated
- Hermann, Sascha
- Schulz, Stefan E.
- Geßner, Thomas
- Albrecht, Manfred
- Universitätsbibliothek Chemnitz
Time of origin
- 2011
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