Microsphere-assisted hyperspectral imaging: super-resolution, non-destructive metrology for semiconductor devices
- Standort
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Deutsche Nationalbibliothek Frankfurt am Main
- Umfang
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1 Online-Ressource.
- Sprache
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Englisch
- Erschienen in
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Microsphere-assisted hyperspectral imaging: super-resolution, non-destructive metrology for semiconductor devices ; volume:13 ; number:1 ; day:28 ; month:5 ; year:2024 ; pages:1-14 ; date:12.2024
Light ; 13, Heft 1 (28.5.2024), 1-14, 12.2024
- Urheber
-
Park, Jangryul
Choi, Youngsun
Kwon, Soonyang
Lee, Youngjun
Kim, Jiwoong
Kim, Jae-joon
Lee, Jihye
Ahn, Jeongho
Kwak, Hidong
Yang, Yusin
Jo, Taeyong
Lee, Myungjun
Kim, Kwangrak
- Beteiligte Personen und Organisationen
-
SpringerLink (Online service)
- DOI
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10.1038/s41377-024-01469-3
- URN
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urn:nbn:de:101:1-2408060955549.831834534413
- Rechteinformation
-
Open Access; Der Zugriff auf das Objekt ist unbeschränkt möglich.
- Letzte Aktualisierung
-
14.08.2025, 10:57 MESZ
Datenpartner
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Beteiligte
- Park, Jangryul
- Choi, Youngsun
- Kwon, Soonyang
- Lee, Youngjun
- Kim, Jiwoong
- Kim, Jae-joon
- Lee, Jihye
- Ahn, Jeongho
- Kwak, Hidong
- Yang, Yusin
- Jo, Taeyong
- Lee, Myungjun
- Kim, Kwangrak
- SpringerLink (Online service)
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