High-power AlGaN deep-ultraviolet micro-light-emitting diode displays for maskless photolithography

Location
Deutsche Nationalbibliothek Frankfurt am Main
Extent
1 Online-Ressource.
Language
Englisch

Bibliographic citation
High-power AlGaN deep-ultraviolet micro-light-emitting diode displays for maskless photolithography ; day:15 ; month:10 ; year:2024 ; pages:1-8
Nature photonics ; (15.10.2024), 1-8

Classification
Elektrotechnik, Elektronik

Creator
Feng, Feng
Liu, Yibo
Zhang, Ke
Yang, Hang
Hyun, Byung-Ryool
Xu, Ke
Kwok, Hoi-Sing
Liu, Zhaojun
Contributor
SpringerLink (Online service)

DOI
10.1038/s41566-024-01551-7
URN
urn:nbn:de:101:1-2412252119589.445365441039
Rights
Open Access; Der Zugriff auf das Objekt ist unbeschränkt möglich.
Last update
15.08.2025, 7:29 AM CEST

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Associated

  • Feng, Feng
  • Liu, Yibo
  • Zhang, Ke
  • Yang, Hang
  • Hyun, Byung-Ryool
  • Xu, Ke
  • Kwok, Hoi-Sing
  • Liu, Zhaojun
  • SpringerLink (Online service)

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