Rolled-Up Nanotech: Illumination-Controlled Hydrofluoric Acid Etching of AlAs Sacrificial Layers

Location
Deutsche Nationalbibliothek Frankfurt am Main
ISSN
1556-276X
Extent
Online-Ressource
Language
Englisch
Notes
online resource.

Bibliographic citation
Rolled-Up Nanotech: Illumination-Controlled Hydrofluoric Acid Etching of AlAs Sacrificial Layers ; volume:4 ; number:12 ; day:3 ; month:9 ; year:2009 ; pages:1463-1468 ; date:12.2009
Nanoscale research letters ; 4, Heft 12 (3.9.2009), 1463-1468, 12.2009

Creator
Costescu, Ruxandra M.
Deneke, Christoph
Thurmer, Dominic J.
Schmidt, Oliver G.
Contributor
SpringerLink (Online service)

DOI
10.1007/s11671-009-9421-8
URN
urn:nbn:de:101:1-2021082920232401921354
Rights
Open Access; Der Zugriff auf das Objekt ist unbeschränkt möglich.
Last update
15.08.2025, 7:27 AM CEST

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Associated

  • Costescu, Ruxandra M.
  • Deneke, Christoph
  • Thurmer, Dominic J.
  • Schmidt, Oliver G.
  • SpringerLink (Online service)

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