Additive Manufacturing of Thermoelectric Microdevices for 4D Thermometry

Abstract: Thermometry, the process of measuring temperature, is one of the most fundamental tasks not only for understanding the thermodynamics of basic physical, chemical, and biological processes but also for thermal management of microelectronics. However, it is a challenge to acquire microscale temperature fields in both space and time. Here, a 3D printed micro‐thermoelectric device that enables direct 4D (3D Space + Time) thermometry at the microscale is reported. The device is composed of freestanding thermocouple probe networks, fabricated by bi‐metal 3D printing with an outstanding spatial resolution of a few µm. It shows that the developed 4D thermometry can explore dynamics of Joule heating or evaporative cooling on microscale subjects of interest such as a microelectrode or a water meniscus. The utilization of 3D printing further opens up the possibility to freely realize a wide range of on‐chip, freestanding microsensors or microelectronic devices without the design restrictions by manufacturing processes.

Standort
Deutsche Nationalbibliothek Frankfurt am Main
Umfang
Online-Ressource
Sprache
Englisch

Erschienen in
Additive Manufacturing of Thermoelectric Microdevices for 4D Thermometry ; day:30 ; month:06 ; year:2023 ; extent:10
Advanced materials ; (30.06.2023) (gesamt 10)

Urheber
Lee, Heekwon
Wang, Zhuoran
Rao, Qing
Lee, Sanghyeon
Huan, Xiao
Liu, Yu
Yang, Jihyuk
Chen, Mojun
Ki, Dong‐Keun
Kim, Ji Tae

DOI
10.1002/adma.202301704
URN
urn:nbn:de:101:1-2023070115071242546988
Rechteinformation
Open Access; Der Zugriff auf das Objekt ist unbeschränkt möglich.
Letzte Aktualisierung
14.08.2025, 10:44 MESZ

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Beteiligte

  • Lee, Heekwon
  • Wang, Zhuoran
  • Rao, Qing
  • Lee, Sanghyeon
  • Huan, Xiao
  • Liu, Yu
  • Yang, Jihyuk
  • Chen, Mojun
  • Ki, Dong‐Keun
  • Kim, Ji Tae

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