- Standort
-
Deutsche Nationalbibliothek Frankfurt am Main
- ISSN
-
2520-8128
- Umfang
-
Online-Ressource
- Sprache
-
Englisch
- Anmerkungen
-
online resource.
- Erschienen in
-
Promising Lithography Techniques for Next-Generation Logic Devices ; volume:1 ; number:2 ; day:23 ; month:4 ; year:2018 ; pages:67-81 ; date:6.2018
Nanomanufacturing and metrology ; 1, Heft 2 (23.4.2018), 67-81, 6.2018
- Klassifikation
-
Physik
- Urheber
-
Hasan, Rashed Md. Murad
- Beteiligte Personen und Organisationen
-
Luo, Xichun
SpringerLink (Online service)
- DOI
-
10.1007/s41871-018-0016-9
- URN
-
urn:nbn:de:101:1-2018070300271256296216
- Rechteinformation
-
Der Zugriff auf das Objekt ist unbeschränkt möglich.
- Letzte Aktualisierung
-
15.08.2025, 07:37 MESZ
Datenpartner
Dieses Objekt wird bereitgestellt von:
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Beteiligte
- Hasan, Rashed Md. Murad
- Luo, Xichun
- SpringerLink (Online service)
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