- Location
-
Deutsche Nationalbibliothek Frankfurt am Main
- ISSN
-
2520-8128
- Extent
-
Online-Ressource
- Language
-
Englisch
- Notes
-
online resource.
- Bibliographic citation
-
Promising Lithography Techniques for Next-Generation Logic Devices ; volume:1 ; number:2 ; day:23 ; month:4 ; year:2018 ; pages:67-81 ; date:6.2018
Nanomanufacturing and metrology ; 1, Heft 2 (23.4.2018), 67-81, 6.2018
- Classification
-
Physik
- Creator
-
Hasan, Rashed Md. Murad
- Contributor
-
Luo, Xichun
SpringerLink (Online service)
- DOI
-
10.1007/s41871-018-0016-9
- URN
-
urn:nbn:de:101:1-2018070300271256296216
- Rights
-
Der Zugriff auf das Objekt ist unbeschränkt möglich.
- Last update
-
15.08.2025, 7:37 AM CEST
Data provider
This object is provided by:
Deutsche Nationalbibliothek. If you have any questions about the object, please contact the data provider.
Deutsche Nationalbibliothek. If you have any questions about the object, please contact the data provider.
Associated
- Hasan, Rashed Md. Murad
- Luo, Xichun
- SpringerLink (Online service)
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