Promising Lithography Techniques for Next-Generation Logic Devices

Location
Deutsche Nationalbibliothek Frankfurt am Main
ISSN
2520-8128
Extent
Online-Ressource
Language
Englisch
Notes
online resource.

Bibliographic citation
Promising Lithography Techniques for Next-Generation Logic Devices ; volume:1 ; number:2 ; day:23 ; month:4 ; year:2018 ; pages:67-81 ; date:6.2018
Nanomanufacturing and metrology ; 1, Heft 2 (23.4.2018), 67-81, 6.2018

Classification
Physik

Creator
Hasan, Rashed Md. Murad
Contributor
Luo, Xichun
SpringerLink (Online service)

DOI
10.1007/s41871-018-0016-9
URN
urn:nbn:de:101:1-2018070300271256296216
Rights
Der Zugriff auf das Objekt ist unbeschränkt möglich.
Last update
15.08.2025, 7:37 AM CEST

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Associated

  • Hasan, Rashed Md. Murad
  • Luo, Xichun
  • SpringerLink (Online service)

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