Maskless lithography for versatile and low cost fabrication of polymer based micro optical structures
- Location
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Deutsche Nationalbibliothek Frankfurt am Main
- Extent
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Online-Ressource
- Language
-
Englisch
- Bibliographic citation
-
In: Khan, M.S.; Lachmayr, R.; Roth, B.: Maskless lithography for versatile and low cost fabrication of polymer based micro optical structures. In: OSA Continuum 3 (2020), Nr. 10, S. 2808-2816. DOI: https://doi.org/10.1364/OSAC.400056
- Event
-
Veröffentlichung
- (where)
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Hannover, Hannover
- (who)
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Gottfried Wilhelm Leibniz Universität Hannover, Technische Informationsbibliothek (TIB)
- (when)
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2020
- Creator
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Khan, Muhammad Shaukat
Lachmayr, Roland
Roth, Bernhard
- DOI
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10.15488/10923
- URN
-
urn:nbn:de:101:1-2021052702090147409654
- Rights
-
Der Zugriff auf das Objekt ist unbeschränkt möglich.
- Last update
-
25.03.2025, 1:54 PM CET
Data provider
This object is provided by:
Deutsche Nationalbibliothek. If you have any questions about the object, please contact the data provider.
Deutsche Nationalbibliothek. If you have any questions about the object, please contact the data provider.
Associated
- Khan, Muhammad Shaukat
- Lachmayr, Roland
- Roth, Bernhard
- Gottfried Wilhelm Leibniz Universität Hannover, Technische Informationsbibliothek (TIB)
Time of origin
- 2020
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