Atomic and Close-to-Atomic Scale Manufacturing: A Review on Atomic Layer Removal Methods Using Atomic Force Microscopy
- Location
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Deutsche Nationalbibliothek Frankfurt am Main
- ISSN
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2520-8128
- Extent
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Online-Ressource
- Language
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Englisch
- Notes
-
online resource.
- Bibliographic citation
-
Atomic and Close-to-Atomic Scale Manufacturing: A Review on Atomic Layer Removal Methods Using Atomic Force Microscopy ; day:26 ; month:6 ; year:2020 ; pages:1-20
Nanomanufacturing and metrology ; (26.6.2020), 1-20
- Creator
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Mathew, Paven Thomas
Rodriguez, Brian J.
Fang, Fengzhou
- Contributor
-
SpringerLink (Online service)
- DOI
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10.1007/s41871-020-00067-2
- URN
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urn:nbn:de:101:1-2020082723333392331564
- Rights
-
Open Access; Der Zugriff auf das Objekt ist unbeschränkt möglich.
- Last update
-
14.08.2025, 10:49 AM CEST
Data provider
This object is provided by:
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Deutsche Nationalbibliothek. If you have any questions about the object, please contact the data provider.
Associated
- Mathew, Paven Thomas
- Rodriguez, Brian J.
- Fang, Fengzhou
- SpringerLink (Online service)
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