Three-Dimensional Nano-displacement Measurement by Four-Beam Laser Interferometry
- Location
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Deutsche Nationalbibliothek Frankfurt am Main
- Extent
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1 Online-Ressource.
- Language
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Englisch
- Bibliographic citation
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Three-Dimensional Nano-displacement Measurement by Four-Beam Laser Interferometry ; volume:7 ; number:1 ; day:12 ; month:4 ; year:2024 ; pages:1-8 ; date:12.2024
Nanomanufacturing and metrology ; 7, Heft 1 (12.4.2024), 1-8, 12.2024
- Creator
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Zhang, Xu
Wang, Zi
Liu, Mengnan
Song, Zhengxun
Wang, Zuobin
Dong, Litong
- Contributor
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SpringerLink (Online service)
- DOI
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10.1007/s41871-024-00230-z
- URN
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urn:nbn:de:101:1-2406252107588.234208341923
- Rights
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Open Access; Der Zugriff auf das Objekt ist unbeschränkt möglich.
- Last update
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14.08.2025, 11:03 AM CEST
Data provider
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Associated
- Zhang, Xu
- Wang, Zi
- Liu, Mengnan
- Song, Zhengxun
- Wang, Zuobin
- Dong, Litong
- SpringerLink (Online service)
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