Competitive co-diffusion as a route to enhanced step coverage in chemical vapor deposition
- Location
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Deutsche Nationalbibliothek Frankfurt am Main
- Extent
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1 Online-Ressource.
- Language
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Englisch
- Bibliographic citation
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Competitive co-diffusion as a route to enhanced step coverage in chemical vapor deposition ; volume:15 ; number:1 ; day:11 ; month:12 ; year:2024 ; pages:1-7 ; date:12.2024
Nature Communications ; 15, Heft 1 (11.12.2024), 1-7, 12.2024
- Creator
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Choolakkal, Arun Haridas
Niiranen, Pentti
Dorri, Samira
Birch, Jens
Pedersen, Henrik
- Contributor
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SpringerLink (Online service)
- DOI
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10.1038/s41467-024-55007-1
- URN
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urn:nbn:de:101:1-2502230806464.443356899283
- Rights
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Open Access; Der Zugriff auf das Objekt ist unbeschränkt möglich.
- Last update
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15.08.2025, 7:33 AM CEST
Data provider
This object is provided by:
Deutsche Nationalbibliothek. If you have any questions about the object, please contact the data provider.
Deutsche Nationalbibliothek. If you have any questions about the object, please contact the data provider.
Associated
- Choolakkal, Arun Haridas
- Niiranen, Pentti
- Dorri, Samira
- Birch, Jens
- Pedersen, Henrik
- SpringerLink (Online service)
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