Hochschulschrift

Development of molecular glasses for solvent-free photolithography utilizing combinatorial vapor deposition

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Location: Deutsche Nationalbibliothek Frankfurt am Main

Extent: Online-Ressource

Language: Englisch

Notes: Bayreuth, Univ., Diss., 2007

Classification: Elektrotechnik, Elektronik

Keyword: Photoresist ; Photolithographie ; PVD-Verfahren ; Dünne Schicht ; Organisches Glas

Creator: Pfeiffer, Frauke

URN: urn:nbn:de:bvb:703-opus-3899

Rights: Der Zugriff auf das Objekt ist unbeschränkt möglich.

Last update: 14.08.2025, 11:00 AM CEST

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Pfeiffer, Frauke

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Development of molecular glasses for solvent-free photolithography utilizing combinatorial vapor deposition

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Other Objects (12)

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Solvent-free carbon sphere nanofluids towards intelligent lubrication regulation

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