Entwicklung einer Wechselschnittstelle für Tools in Nanofabrikationsmaschinen mit hochreproduzierbarer Lagedefinition
- Alternative title
-
Development of a changing interfacefor tools in nanofabrication machines with a highly reproducible position definition
- Location
-
Deutsche Nationalbibliothek Frankfurt am Main
- Extent
-
Online-Ressource
- Language
-
Deutsch
- Notes
-
In Fünfte IFToMM D-A-CH Konferenz 2019 : 26./27. Februar 2019, RWTH Aachen
- Keyword
-
Nanometerbereich
Kinematik
- Event
-
Veröffentlichung
- (where)
-
Duisburg, Essen
- (who)
-
Universität Duisburg-Essen
- (when)
-
2019
- Creator
- DOI
-
10.17185/duepublico/48214
- URN
-
urn:nbn:de:hbz:464-20190222-123754-5
- Rights
-
Open Access unbekannt; Der Zugriff auf das Objekt ist unbeschränkt möglich.
- Last update
-
14.08.2025, 10:57 AM CEST
Data provider
This object is provided by:
Deutsche Nationalbibliothek. If you have any questions about the object, please contact the data provider.
Deutsche Nationalbibliothek. If you have any questions about the object, please contact the data provider.
Associated
- Weigert, Florian
- Theska, René
- Universität Duisburg-Essen
Time of origin
- 2019
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Berührungslos-optische Antastung von Messobjekten unter Ausnutzung astigmatischer Abbildungseigenschaften
Development of a tool-changing system for nanofabrication machines
Calibration of positioning microsystems with subatomic accuracy
Experimental setup for the investigation of reproducibility of novel tool changing systems in nanofabrication machines
Experimental Setup for the Investigation of Reproducibility of Novel Tool Changing Systems in Nanofabrication Machines
A laser beam deflection system for heat treatments in large scale additive manufacturing
Adjustment concept for compensating for stiffness and tilt sensitivity of a novel monolithic electromagnetic force compensation (EMFC) weighing cell
The influence of the contact force in dilatometry : force-controlled measuring cells in dilatometry
Enhanced stiffness characterization of load cells by relative change of the natural frequency forced by a defined mass shift
Avtomatizacija centrirovki linz pri vklejke v opravy
Approaches to cost-effective manufacturing of precision aspheres
Cement-bound mineral casted parts in precision engineering
Berührungslos-optische Antastung von Messobjekten unter Ausnutzung astigmatischer Abbildungseigenschaften
Development of a tool-changing system for nanofabrication machines
Calibration of positioning microsystems with subatomic accuracy
Experimental setup for the investigation of reproducibility of novel tool changing systems in nanofabrication machines
Experimental Setup for the Investigation of Reproducibility of Novel Tool Changing Systems in Nanofabrication Machines
A laser beam deflection system for heat treatments in large scale additive manufacturing
Adjustment concept for compensating for stiffness and tilt sensitivity of a novel monolithic electromagnetic force compensation (EMFC) weighing cell
The influence of the contact force in dilatometry : force-controlled measuring cells in dilatometry
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