Miniaturized silicon-based capacitive six-axis force/torque sensor with large range, high sensitivity, and low crosstalk
- Location
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Deutsche Nationalbibliothek Frankfurt am Main
- Extent
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1 Online-Ressource.
- Language
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Englisch
- Bibliographic citation
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Miniaturized silicon-based capacitive six-axis force/torque sensor with large range, high sensitivity, and low crosstalk ; volume:10 ; number:1 ; day:29 ; month:11 ; year:2024 ; pages:1-17 ; date:12.2024
Microsystems & nanoengineering ; 10, Heft 1 (29.11.2024), 1-17, 12.2024
- Creator
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Tan, Renjie
Xia, Yong
Han, Xiangguang
Huang, Linya
Gao, Wendi
Jia, Chen
Yang, Ping
Lin, Qijing
Ding, Shujiang
Wang, Chenying
Zhao, Libo
- Contributor
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SpringerLink (Online service)
- DOI
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10.1038/s41378-024-00831-0
- URN
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urn:nbn:de:101:1-2502142129380.175367403975
- Rights
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Open Access; Der Zugriff auf das Objekt ist unbeschränkt möglich.
- Last update
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15.08.2025, 7:28 AM CEST
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Associated
- Tan, Renjie
- Xia, Yong
- Han, Xiangguang
- Huang, Linya
- Gao, Wendi
- Jia, Chen
- Yang, Ping
- Lin, Qijing
- Ding, Shujiang
- Wang, Chenying
- Zhao, Libo
- SpringerLink (Online service)
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