Hochschulschrift
Solid modeling applied to three-dimensional semiconductor process simulation
- Location
-
Deutsche Nationalbibliothek Frankfurt am Main
- ISBN
-
9783891919477
3891919476
- Dimensions
-
21 cm
- Extent
-
XIV, 124 S.
- Edition
-
1. Aufl.
- Language
-
Deutsch
- Notes
-
graph. Darst.
Zugl.: Zürich, Eidgenössische Techn. Hochsch., Diss., 1995
- Bibliographic citation
-
Series in microelectronics ; Vol. 48
- Keyword
-
VLSI
Constructive solid geometry
- Event
-
Veröffentlichung
- (where)
-
Konstanz
- (who)
-
Hartung-Gorre
- (when)
-
1995
- Creator
-
Westermann, Marc
- Table of contents
- Rights
-
Bei diesem Objekt liegt nur das Inhaltsverzeichnis digital vor. Der Zugriff darauf ist unbeschränkt möglich.
- Last update
- 11.06.2025, 2:29 PM CEST
Data provider
This object is provided by:
Deutsche Nationalbibliothek. If you have any questions about the object, please contact the data provider.
Deutsche Nationalbibliothek. If you have any questions about the object, please contact the data provider.
Object type
- Hochschulschrift
Associated
- Westermann, Marc
- Hartung-Gorre
Time of origin
- 1995
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