Conformal SiO2 coating of sub-100 nm diameter channels of polycarbonate etched ion-track channels by atomic layer deposition

Location
Deutsche Nationalbibliothek Frankfurt am Main
Extent
Online-Ressource

Bibliographic citation
Conformal SiO2 coating of sub-100 nm diameter channels of polycarbonate etched ion-track channels by atomic layer deposition ; volume:6 ; pages:472-479
Beilstein journal of nanotechnology ; 6, 472-479

Classification
Ingenieurwissenschaften und Maschinenbau

DOI
10.3762/bjnano.6.48
URN
urn:nbn:de:101:1-201601133366
Rights
Der Zugriff auf das Objekt ist unbeschränkt möglich.
Last update
15.08.2025, 7:20 AM CEST

Data provider

This object is provided by:
Deutsche Nationalbibliothek. If you have any questions about the object, please contact the data provider.

Other Objects (12)