Conformal SiO2 coating of sub-100 nm diameter channels of polycarbonate etched ion-track channels by atomic layer deposition
- Location
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Deutsche Nationalbibliothek Frankfurt am Main
- Extent
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Online-Ressource
- Bibliographic citation
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Conformal SiO2 coating of sub-100 nm diameter channels of polycarbonate etched ion-track channels by atomic layer deposition ; volume:6 ; pages:472-479
Beilstein journal of nanotechnology ; 6, 472-479
- Classification
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Ingenieurwissenschaften und Maschinenbau
- DOI
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10.3762/bjnano.6.48
- URN
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urn:nbn:de:101:1-201601133366
- Rights
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Der Zugriff auf das Objekt ist unbeschränkt möglich.
- Last update
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15.08.2025, 7:20 AM CEST
Data provider
Deutsche Nationalbibliothek. If you have any questions about the object, please contact the data provider.