- Location
-
Deutsche Nationalbibliothek Frankfurt am Main
- Extent
-
1 Online-Ressource.
- Language
-
Englisch
- Bibliographic citation
-
Lens-free reflective topography for high-resolution wafer inspection ; volume:14 ; number:1 ; day:8 ; month:5 ; year:2024 ; pages:1-13 ; date:12.2024
Scientific reports ; 14, Heft 1 (8.5.2024), 1-13, 12.2024
- Classification
-
Elektrotechnik, Elektronik
- Creator
-
Lee, Hojun
Sung, Jangwoon
Park, Seungbeom
Shin, Junho
Kim, Hyungjin
Kim, Wookrae
Lee, Myungjun
- Contributor
-
SpringerLink (Online service)
- DOI
-
10.1038/s41598-024-59496-4
- URN
-
urn:nbn:de:101:1-2407172101552.731497884090
- Rights
-
Open Access; Der Zugriff auf das Objekt ist unbeschränkt möglich.
- Last update
- 14.08.2025, 11:03 AM CEST
Data provider
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Associated
- Lee, Hojun
- Sung, Jangwoon
- Park, Seungbeom
- Shin, Junho
- Kim, Hyungjin
- Kim, Wookrae
- Lee, Myungjun
- SpringerLink (Online service)
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