High Quality Rolled-Up Microstructures Enabled by Silicon Dry Release Technologies
- Location
-
Deutsche Nationalbibliothek Frankfurt am Main
- Extent
-
Online-Ressource
- Language
-
Englisch
- Notes
-
Chemnitz, Technische Universität Chemnitz, Dissertation, 2022
- Keyword
-
Silicon
Whispering gallery resonator
Interferenz
Plasmaätzen
Kondensator
- Event
-
Veröffentlichung
- (where)
-
Chemnitz
- (who)
-
Technische Universität Chemnitz
- (when)
-
2022
- Creator
- Contributor
- URN
-
urn:nbn:de:bsz:ch1-qucosa2-799535
- Rights
-
Der Zugriff auf das Objekt ist unbeschränkt möglich.
- Last update
-
15.08.2025, 7:21 AM CEST
Data provider
This object is provided by:
Deutsche Nationalbibliothek. If you have any questions about the object, please contact the data provider.
Deutsche Nationalbibliothek. If you have any questions about the object, please contact the data provider.
Associated
- Saggau, Christian Niclaas
- Schmidt, Oliver G.
- Fomin, Vladimir M.
- Technische Universität Chemnitz
Time of origin
- 2022
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