Sound-Based Depth Estimation of Glass Microchannel in Laser-Induced Backside Wet Etching Using Wavelet Transform
- Standort
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Deutsche Nationalbibliothek Frankfurt am Main
- Umfang
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1 Online-Ressource.
- Sprache
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Englisch
- Erschienen in
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Sound-Based Depth Estimation of Glass Microchannel in Laser-Induced Backside Wet Etching Using Wavelet Transform ; day:8 ; month:2 ; year:2024 ; pages:1-16
International journal of precision engineering and manufacturing-green technology ; (8.2.2024), 1-16
- Urheber
-
Kim, Geun Young
Song, Dae-Seob
Kwon, Kui-Kam
Ahn, Sung-Hoon
- Beteiligte Personen und Organisationen
-
SpringerLink (Online service)
- DOI
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10.1007/s40684-023-00590-9
- URN
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urn:nbn:de:101:1-2404170746473.326065763897
- Rechteinformation
-
Open Access; Der Zugriff auf das Objekt ist unbeschränkt möglich.
- Letzte Aktualisierung
-
14.08.2025, 10:53 MESZ
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Beteiligte
- Kim, Geun Young
- Song, Dae-Seob
- Kwon, Kui-Kam
- Ahn, Sung-Hoon
- SpringerLink (Online service)
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