Film thickness characterization in dual-axis spin coating of a sphere

Location
Deutsche Nationalbibliothek Frankfurt am Main
Extent
1 Online-Ressource.
Language
Englisch

Bibliographic citation
Film thickness characterization in dual-axis spin coating of a sphere ; day:31 ; month:5 ; year:2024 ; pages:1-15
European physical journal special topics ; (31.5.2024), 1-15

Creator
McIntyre, Finn
Sellier, Mathieu
Gooch, Shayne
Nock, Volker
Contributor
SpringerLink (Online service)

DOI
10.1140/epjs/s11734-024-01153-y
URN
urn:nbn:de:101:1-2408082103203.198839925888
Rights
Open Access; Der Zugriff auf das Objekt ist unbeschränkt möglich.
Last update
14.08.2025, 10:50 AM CEST

Data provider

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Associated

  • McIntyre, Finn
  • Sellier, Mathieu
  • Gooch, Shayne
  • Nock, Volker
  • SpringerLink (Online service)

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