50 nm Scale Alignment Method for Hybrid Manufacturing Processes for Full 3D Structuring
- Standort
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Deutsche Nationalbibliothek Frankfurt am Main
- ISSN
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2005-4602
- Umfang
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Online-Ressource
- Sprache
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Englisch
- Anmerkungen
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online resource.
- Erschienen in
-
50 nm Scale Alignment Method for Hybrid Manufacturing Processes for Full 3D Structuring ; volume:21 ; number:12 ; day:26 ; month:10 ; year:2020 ; pages:2407-2417 ; date:12.2020
International journal of precision engineering and manufacturing ; 21, Heft 12 (26.10.2020), 2407-2417, 12.2020
- Urheber
-
Jang, Ki-Hwan
Yoon, Hae-Sung
Lee, Hyun-Taek
Kim, Eunseob
Ahn, Sung-Hoon
- Beteiligte Personen und Organisationen
-
SpringerLink (Online service)
- DOI
-
10.1007/s12541-020-00411-y
- URN
-
urn:nbn:de:101:1-2021011018485338989830
- Rechteinformation
-
Open Access; Der Zugriff auf das Objekt ist unbeschränkt möglich.
- Letzte Aktualisierung
-
15.08.2025, 07:39 MESZ
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Beteiligte
- Jang, Ki-Hwan
- Yoon, Hae-Sung
- Lee, Hyun-Taek
- Kim, Eunseob
- Ahn, Sung-Hoon
- SpringerLink (Online service)
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