50 nm Scale Alignment Method for Hybrid Manufacturing Processes for Full 3D Structuring
- Location
-
Deutsche Nationalbibliothek Frankfurt am Main
- ISSN
-
2005-4602
- Extent
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Online-Ressource
- Language
-
Englisch
- Notes
-
online resource.
- Bibliographic citation
-
50 nm Scale Alignment Method for Hybrid Manufacturing Processes for Full 3D Structuring ; volume:21 ; number:12 ; day:26 ; month:10 ; year:2020 ; pages:2407-2417 ; date:12.2020
International journal of precision engineering and manufacturing ; 21, Heft 12 (26.10.2020), 2407-2417, 12.2020
- Creator
-
Jang, Ki-Hwan
Yoon, Hae-Sung
Lee, Hyun-Taek
Kim, Eunseob
Ahn, Sung-Hoon
- Contributor
-
SpringerLink (Online service)
- DOI
-
10.1007/s12541-020-00411-y
- URN
-
urn:nbn:de:101:1-2021011018485338989830
- Rights
-
Open Access; Der Zugriff auf das Objekt ist unbeschränkt möglich.
- Last update
-
15.08.2025, 7:39 AM CEST
Data provider
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Associated
- Jang, Ki-Hwan
- Yoon, Hae-Sung
- Lee, Hyun-Taek
- Kim, Eunseob
- Ahn, Sung-Hoon
- SpringerLink (Online service)
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