High resolution surface plasmon measurements - a sensitive probe for thickness and structural information of ultrathin films
- Standort
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Deutsche Nationalbibliothek Frankfurt am Main
- Umfang
-
Online-Ressource
- Sprache
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Englisch
- Anmerkungen
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In: Process Module Metrology, Control and Clustering, Proceedings of SPIE1594 (1991). - S. 344-351
- Klassifikation
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Physik
- Ereignis
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Veröffentlichung
- (wo)
-
Konstanz
- (wer)
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Bibliothek der Universität Konstanz
- (wann)
-
2007
- Urheber
- URN
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urn:nbn:de:bsz:352-opus-31090
- Rechteinformation
-
Der Zugriff auf das Objekt ist unbeschränkt möglich.
- Letzte Aktualisierung
-
25.03.2025, 13:43 MEZ
Datenpartner
Dieses Objekt wird bereitgestellt von:
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Beteiligte
- Albrecht, Uwe
- Dilger, Herbert
- Evers, Peter
- Leiderer, Paul
- Bibliothek der Universität Konstanz
Entstanden
- 2007
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