- Location
-
Deutsche Nationalbibliothek Frankfurt am Main
- Extent
-
Online-Ressource
- Language
-
Englisch
- Notes
-
Bochum, Ruhr-Universität Bochum, Dissertation, 2022
- Keyword
-
Hochfrequenzplasma
Plasmarandschicht
Mathematisches Modell
Plasmadiagnostik
Niederdruckplasma
Plasmarandschicht
Modellierung
Simulation
Schichtdicke
Entladung
- Event
-
Veröffentlichung
- (where)
-
Bochum
- (who)
-
Ruhr-Universität Bochum
- (when)
-
2023
- Creator
- Contributor
-
Brinkmann, Ralf Peter
Mussenbrock, Thomas
Fakultät für Elektrotechnik und Informationstechnik
- URN
-
urn:nbn:de:hbz:294-96464
- Rights
-
Der Zugriff auf das Objekt ist unbeschränkt möglich.
- Last update
-
14.08.2025, 10:52 AM CEST
Data provider
This object is provided by:
Deutsche Nationalbibliothek. If you have any questions about the object, please contact the data provider.
Deutsche Nationalbibliothek. If you have any questions about the object, please contact the data provider.
Associated
- Naggary, Schabnam
- Brinkmann, Ralf Peter
- Mussenbrock, Thomas
- Fakultät für Elektrotechnik und Informationstechnik
- Ruhr-Universität Bochum
Time of origin
- 2023
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