Ranking routes in semiconductor wafer fabs

Location
Deutsche Nationalbibliothek Frankfurt am Main
Extent
1 Online-Ressource.
Language
Englisch

Bibliographic citation
Ranking routes in semiconductor wafer fabs ; volume:13 ; number:1 ; day:15 ; month:8 ; year:2023 ; pages:1-12 ; date:12.2023
Scientific reports ; 13, Heft 1 (15.8.2023), 1-12, 12.2023

Creator
Gupta, Shreya
Hasenbein, John J.
Kim, Byeongdong
Contributor
SpringerLink (Online service)

DOI
10.1038/s41598-023-39187-2
URN
urn:nbn:de:101:1-2024020112233213586365
Rights
Open Access; Der Zugriff auf das Objekt ist unbeschränkt möglich.
Last update
15.08.2025, 7:34 AM CEST

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Associated

  • Gupta, Shreya
  • Hasenbein, John J.
  • Kim, Byeongdong
  • SpringerLink (Online service)

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