Features of Plasma-Chemical Hydrogen Reduction of Volatile Silicon and Germanium Chlorides in RF-arc Discharge
- Location
-
Deutsche Nationalbibliothek Frankfurt am Main
- Extent
-
Online-Ressource
- Language
-
Englisch
- Event
-
Veröffentlichung
- (where)
-
Berlin
- (who)
-
Bundesanstalt für Materialforschung und -prüfung (BAM)
- (when)
-
2023
- Creator
-
Gornushkin, Igor
Kornev, R.A.
Shabarova, L.V.
Ermakov, A.A.
Mochalov, G.M.
Rekunov, N.V.
Medov, V.A.
Chaschina, A.D.
Kalinina, A.A.
- DOI
-
10.20944/preprints202311.1412.v1
- URN
-
urn:nbn:de:kobv:b43-588909
- Rights
-
Der Zugriff auf das Objekt ist unbeschränkt möglich.
- Last update
-
25.03.2025, 1:43 PM CET
Data provider
This object is provided by:
Deutsche Nationalbibliothek. If you have any questions about the object, please contact the data provider.
Deutsche Nationalbibliothek. If you have any questions about the object, please contact the data provider.
Associated
- Gornushkin, Igor
- Kornev, R.A.
- Shabarova, L.V.
- Ermakov, A.A.
- Mochalov, G.M.
- Rekunov, N.V.
- Medov, V.A.
- Chaschina, A.D.
- Kalinina, A.A.
- Bundesanstalt für Materialforschung und -prüfung (BAM)
Time of origin
- 2023
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Plasma-Chemical Disposal of Silicon and Germanium Tetrachlorides Waste by Hydrogen Reduction
Impact of internal Faraday shields on RF driven hydrogen discharges
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Temperature and density measurements at an inductively RF excited hydrogen plasma discharge
Plasma Modification of Polydimethylsiloxane in a hydrogen CCRF low-pressure discharge
Plasma modification of polydimethylsiloxane in a hydrogen CCRF low-pressure discharge
Micro-particles as thermal probes in a low-pressure rf-discharge
Diagnostics and modeling of an inductively coupled radio frequency discharge in hydrogen
Electrical characterization of carbon-hydrogen complexes in silicon and silicon-germanium alloys
Plasma-Chemical Disposal of Silicon and Germanium Tetrachlorides Waste by Hydrogen Reduction
Impact of internal Faraday shields on RF driven hydrogen discharges
Neue Verbindungen mit Germanium-Germanium- und Germanium-Kohlenstoff-Mehrfachbindungen
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