Features of Plasma-Chemical Hydrogen Reduction of Volatile Silicon and Germanium Chlorides in RF-arc Discharge
- Standort
-
Deutsche Nationalbibliothek Frankfurt am Main
- Umfang
-
Online-Ressource
- Sprache
-
Englisch
- Ereignis
-
Veröffentlichung
- (wo)
-
Berlin
- (wer)
-
Bundesanstalt für Materialforschung und -prüfung (BAM)
- (wann)
-
2023
- Urheber
-
Gornushkin, Igor
Kornev, R.A.
Shabarova, L.V.
Ermakov, A.A.
Mochalov, G.M.
Rekunov, N.V.
Medov, V.A.
Chaschina, A.D.
Kalinina, A.A.
- DOI
-
10.20944/preprints202311.1412.v1
- URN
-
urn:nbn:de:kobv:b43-588909
- Rechteinformation
-
Der Zugriff auf das Objekt ist unbeschränkt möglich.
- Letzte Aktualisierung
-
25.03.2025, 13:43 MEZ
Datenpartner
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Beteiligte
- Gornushkin, Igor
- Kornev, R.A.
- Shabarova, L.V.
- Ermakov, A.A.
- Mochalov, G.M.
- Rekunov, N.V.
- Medov, V.A.
- Chaschina, A.D.
- Kalinina, A.A.
- Bundesanstalt für Materialforschung und -prüfung (BAM)
Entstanden
- 2023
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