- Location
-
Deutsche Nationalbibliothek Frankfurt am Main
- Extent
-
1 Online-Ressource.
- Language
-
Englisch
- Bibliographic citation
-
Varifocal MEMS mirrors for high-speed axial focus scanning: a review ; volume:9 ; number:1 ; day:27 ; month:10 ; year:2023 ; pages:1-15 ; date:12.2023
Microsystems & nanoengineering ; 9, Heft 1 (27.10.2023), 1-15, 12.2023
- Creator
-
Pribošek, Jaka
Bainschab, Markus
Sasaki, Takashi
- Contributor
-
SpringerLink (Online service)
- DOI
-
10.1038/s41378-022-00481-0
- URN
-
urn:nbn:de:101:1-2024011513451503305385
- Rights
-
Open Access; Der Zugriff auf das Objekt ist unbeschränkt möglich.
- Last update
-
15.08.2025, 7:32 AM CEST
Data provider
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Deutsche Nationalbibliothek. If you have any questions about the object, please contact the data provider.
Associated
- Pribošek, Jaka
- Bainschab, Markus
- Sasaki, Takashi
- SpringerLink (Online service)
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