- Standort
-
Deutsche Nationalbibliothek Frankfurt am Main
- ISSN
-
1543-1851
- Umfang
-
Online-Ressource
- Sprache
-
Englisch
- Anmerkungen
-
online resource.
- Erschienen in
-
Gassing During Tapping of Silicon ; day:19 ; month:7 ; year:2022 ; pages:1-9
JOM ; (19.7.2022), 1-9
- Urheber
-
Vachaparambil, Kurian J.
Panjwani, Balram
Olsen, Jan Erik
- Beteiligte Personen und Organisationen
-
SpringerLink (Online service)
- DOI
-
10.1007/s11837-022-05390-1
- URN
-
urn:nbn:de:101:1-2022100121354348944677
- Rechteinformation
-
Open Access; Der Zugriff auf das Objekt ist unbeschränkt möglich.
- Letzte Aktualisierung
-
15.08.2025, 07:20 MESZ
Datenpartner
Dieses Objekt wird bereitgestellt von:
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Beteiligte
- Vachaparambil, Kurian J.
- Panjwani, Balram
- Olsen, Jan Erik
- SpringerLink (Online service)
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