Enhancement of a-IGZO TFT Device Performance Using a Clean Interface Process via Etch-Stopper Nano-layers

Location
Deutsche Nationalbibliothek Frankfurt am Main
ISSN
1556-276X
Extent
Online-Ressource
Language
Englisch
Notes
online resource.

Bibliographic citation
Enhancement of a-IGZO TFT Device Performance Using a Clean Interface Process via Etch-Stopper Nano-layers ; volume:13 ; number:1 ; day:29 ; month:5 ; year:2018 ; pages:1-9 ; date:12.2018
Nanoscale research letters ; 13, Heft 1 (29.5.2018), 1-9, 12.2018

Classification
Elektrotechnik, Elektronik

Creator
Chung, Jae-Moon
Contributor
Zhang, Xiaokun
Shang, Fei
Kim, Ji-Hoon
Wang, Xiao-Lin
Liu, Shuai
Yang, Baoguo
Xiang, Yong
SpringerLink (Online service)

DOI
10.1186/s11671-018-2571-9
URN
urn:nbn:de:101:1-2018080523002738113143
Rights
Der Zugriff auf das Objekt ist unbeschränkt möglich.
Last update
15.08.2025, 7:24 AM CEST

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Associated

  • Chung, Jae-Moon
  • Zhang, Xiaokun
  • Shang, Fei
  • Kim, Ji-Hoon
  • Wang, Xiao-Lin
  • Liu, Shuai
  • Yang, Baoguo
  • Xiang, Yong
  • SpringerLink (Online service)

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