Institut für Mikrostrukturtechnik

Place of Business: Karlsruhe, Eggenstein-Leopoldshafen

Predecessor: Institut für Kernverfahrenstechnik (Karlsruhe)

http://www.imt.kit.edu/

Works:

Großformatige Abformung mikrostrukturierter Formeinsätze durch Heißprägen
Abformung von Mikrostrukturen auf prozessierten Wafern
Entwicklung eines subtraktiven Strukturierungsverfahrens zur Herstellung von Röntgenzwischenmasken für das LIGA-Verfahren
Systemtechnische Analyse und Entwicklung eines Mikroventils in LIGA-Technik

All Objects (5)

Is thematised in:

Die Übertragung von mikrostrukturellen Eigenschaften aus der diskreten Versetzungsdynamik in Kontinuumsbeschreibungen

All Objects (1)

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Institut für Mikrostrukturtechnik

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