Piezoelectric MEMS microphones based on rib structures and single crystal PZT thin film
- Standort
-
Deutsche Nationalbibliothek Frankfurt am Main
- Umfang
-
1 Online-Ressource.
- Sprache
-
Englisch
- Erschienen in
-
Piezoelectric MEMS microphones based on rib structures and single crystal PZT thin film ; volume:10 ; number:1 ; day:8 ; month:11 ; year:2024 ; pages:1-11 ; date:12.2024
Microsystems & nanoengineering ; 10, Heft 1 (8.11.2024), 1-11, 12.2024
- Urheber
-
You, Zhiwei
Gan, Jinghan
Yang, Chong
Tuerhong, Renati
Zhao, Lei
Lu, Yipeng
- Beteiligte Personen und Organisationen
-
SpringerLink (Online service)
- DOI
-
10.1038/s41378-024-00767-5
- URN
-
urn:nbn:de:101:1-2501262138363.693522413060
- Rechteinformation
-
Open Access; Der Zugriff auf das Objekt ist unbeschränkt möglich.
- Letzte Aktualisierung
- 15.08.2025, 07:27 MESZ
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Beteiligte
- You, Zhiwei
- Gan, Jinghan
- Yang, Chong
- Tuerhong, Renati
- Zhao, Lei
- Lu, Yipeng
- SpringerLink (Online service)
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