Analysis of perovskite oxide etching using argon inductively coupled plasmas for photonics applications
- Standort
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Deutsche Nationalbibliothek Frankfurt am Main
- ISSN
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1556-276X
- Umfang
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Online-Ressource
- Sprache
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Englisch
- Anmerkungen
-
online resource.
- Erschienen in
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Analysis of perovskite oxide etching using argon inductively coupled plasmas for photonics applications ; volume:16 ; number:1 ; day:10 ; month:2 ; year:2021 ; pages:1-9 ; date:12.2021
Nanoscale research letters ; 16, Heft 1 (10.2.2021), 1-9, 12.2021
- Urheber
-
Chen, Guanyu
Cheung, Eric Jun Hao
Cao, Yu
Pan, Jisheng
Danner, Aaron J.
- Beteiligte Personen und Organisationen
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SpringerLink (Online service)
- DOI
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10.1186/s11671-021-03494-2
- URN
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urn:nbn:de:101:1-2021033122345504897079
- Rechteinformation
-
Open Access; Der Zugriff auf das Objekt ist unbeschränkt möglich.
- Letzte Aktualisierung
-
14.08.2025, 10:53 MESZ
Datenpartner
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Beteiligte
- Chen, Guanyu
- Cheung, Eric Jun Hao
- Cao, Yu
- Pan, Jisheng
- Danner, Aaron J.
- SpringerLink (Online service)
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