Analysis of perovskite oxide etching using argon inductively coupled plasmas for photonics applications
- Location
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Deutsche Nationalbibliothek Frankfurt am Main
- ISSN
-
1556-276X
- Extent
-
Online-Ressource
- Language
-
Englisch
- Notes
-
online resource.
- Bibliographic citation
-
Analysis of perovskite oxide etching using argon inductively coupled plasmas for photonics applications ; volume:16 ; number:1 ; day:10 ; month:2 ; year:2021 ; pages:1-9 ; date:12.2021
Nanoscale research letters ; 16, Heft 1 (10.2.2021), 1-9, 12.2021
- Creator
-
Chen, Guanyu
Cheung, Eric Jun Hao
Cao, Yu
Pan, Jisheng
Danner, Aaron J.
- Contributor
-
SpringerLink (Online service)
- DOI
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10.1186/s11671-021-03494-2
- URN
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urn:nbn:de:101:1-2021033122345504897079
- Rights
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Open Access; Der Zugriff auf das Objekt ist unbeschränkt möglich.
- Last update
-
14.08.2025, 10:53 AM CEST
Data provider
This object is provided by:
Deutsche Nationalbibliothek. If you have any questions about the object, please contact the data provider.
Deutsche Nationalbibliothek. If you have any questions about the object, please contact the data provider.
Associated
- Chen, Guanyu
- Cheung, Eric Jun Hao
- Cao, Yu
- Pan, Jisheng
- Danner, Aaron J.
- SpringerLink (Online service)
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