Laser Interference Lithography for Fabrication of Planar Scale Gratings for Optical Metrology
- Standort
-
Deutsche Nationalbibliothek Frankfurt am Main
- ISSN
-
2520-8128
- Umfang
-
Online-Ressource
- Sprache
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Englisch
- Anmerkungen
-
online resource.
- Erschienen in
-
Laser Interference Lithography for Fabrication of Planar Scale Gratings for Optical Metrology ; day:16 ; month:1 ; year:2021 ; pages:1-25
Nanomanufacturing and metrology ; (16.1.2021), 1-25
- Urheber
-
Shimizu, Yuki
- Beteiligte Personen und Organisationen
-
SpringerLink (Online service)
- DOI
-
10.1007/s41871-020-00083-2
- URN
-
urn:nbn:de:101:1-2021030818514649131600
- Rechteinformation
-
Open Access; Der Zugriff auf das Objekt ist unbeschränkt möglich.
- Letzte Aktualisierung
-
15.08.2025, 07:20 MESZ
Datenpartner
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Beteiligte
- Shimizu, Yuki
- SpringerLink (Online service)
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