Additive Nano-Lithography with Focused Soft X-rays: Basics, Challenges, and Opportunities
- Location
-
Deutsche Nationalbibliothek Frankfurt am Main
- Extent
-
Online-Ressource
- Language
-
Englisch
- Bibliographic citation
-
In: Micromachines 10.12 (2019): 834.
- Event
-
Veröffentlichung
- (where)
-
Erlangen
- (who)
-
Friedrich-Alexander-Universität Erlangen-Nürnberg (FAU)
- (when)
-
2019
- Creator
-
Späth, Andreas
- DOI
-
10.3390/mi10120834
- URN
-
urn:nbn:de:bvb:29-opus4-125966
- Rights
-
Der Zugriff auf das Objekt ist unbeschränkt möglich.
- Last update
-
14.08.2025, 11:00 AM CEST
Data provider
This object is provided by:
Deutsche Nationalbibliothek. If you have any questions about the object, please contact the data provider.
Deutsche Nationalbibliothek. If you have any questions about the object, please contact the data provider.
Associated
- Späth, Andreas
- Friedrich-Alexander-Universität Erlangen-Nürnberg (FAU)
Time of origin
- 2019
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