Additive Nano-Lithography with Focused Soft X-rays: Basics, Challenges, and Opportunities
- Sprache
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Englisch
- Identifier
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1203374895
Beteiligte Personen und Organisationen
Späth, Andreas
- DOI
-
10.3390/mi10120834
- URN
- Rechteinformation
-
Der Zugriff auf das Objekt ist unbeschränkt möglich.
- Letzte Aktualisierung
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26.01.2023, 13:52 MEZ
Beteiligte
- Späth, Andreas
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