Simulation of electron transport during electron-beam-induced deposition of nanostructures

Location
Deutsche Nationalbibliothek Frankfurt am Main
Extent
Online-Ressource

Bibliographic citation
Simulation of electron transport during electron-beam-induced deposition of nanostructures ; volume:4 ; pages:781-792
Beilstein journal of nanotechnology ; 4, 781-792

Classification
Ingenieurwissenschaften und Maschinenbau

DOI
10.3762/bjnano.4.89
URN
urn:nbn:de:101:1-2014052313639
Rights
Der Zugriff auf das Objekt ist unbeschränkt möglich.
Last update
14.08.2025, 10:49 AM CEST

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